Advanced Platform Technology Center
Christian Zorman, PhD
Dr. Zorman's research focuses on the development of enabling materials for micro- and nanosytems. Of principal interest is the development of plasma-enhanced chemical vapor deposition (PECVD) and sputtering processes for silicon carbide thin films on temperature sensitive substrates, and rapid thermal CVD processes for 3C-SiC films thermal budget-sensitive substrates. His research also develops bioMEMS devices made from liquid crystal polymers, polyimides and thermal plastic polymers for drug delivery systems, neurostimulation, and cell studies.
Dr. Zorman joined the MEMS program at Case Western in 1994 as a Research Associate, was promoted to Senior Research Associate in 1997 and Researcher in 2000. From 2000 to 2002, Dr. Zorman held appointments as Adjunct Assistant Professor in EECS and Interim Director of the Microfabrication Laboratory. He currently serves as a Leonard Case Jr. Professor of Engineering in EECS and Associate Dean for Research (School of Engineering) at CWRU, and a Research Associate with Louis Stokes Cleveland VA Medical Center. Dr. Zorman has authored over 250 technical publications, is a senior member of the IEEE, and past chairman of the MEMS Technical Group in the American Vacuum Society. Dr. Zorman is also a Fellow of the American Vacuum Society.
Photo: MFL – The "Microfabrication Laboratory" is a state-of-the-art fabrication facility, optimized for fabrication of MEMS devices.