Advanced Platform Technology Center
Microfabrication Laboratory (MFL)
The Microfabrication Laboratory is a 5,500 square feet state-of-the-art clean room and fabrication facility that provides the latest in microfabrication and micromachining processes. Dr. Chris Zorman, Associate Director for Research and Scientific Affairs for the APT Center, directs the laboratory which is housed in the Department of Electrical and Computer Engineering. The Class 100 facility supports the University’s strong interdisciplinary MEMS/microsystems research program by providing on-campus fabrication capabilities for a broad range of research projects by investigators from a number of departments within the university; it is also accessible by external organizations for prototype fabrication and R&D. The MFL offers a broad spectrum of micromachining processes, including bulk and surface micromachining, wafer bonding, and micro-molding. Recent equipment additions to the MFL include a spin coater for polymeric thin films, and plasma etch tool that greatly enhances the processing capabilities of non-traditional MEMS materials of particular interest in biomedical applications.
