Advanced Platform Technology Center
Emerging Materials Development and Evaluation (EMDE) Laboratory
Located at Case Western Reserve University, Glennan Building, 2123 Martin Luther King Blvd, Cleveland, OH 44106-7071
The EMDE complements the capabilities of the MFL. Back-end processing steps and microdevice evaluation can be performed in the EMDE Laboratory under the direction of Dr. Christian Zorman. This lab is equipped with tooling useful in characterizing materials for MEMS applications. The laboratory contains a PC-based apparatus for load deflection and burst testing of micromachined membranes, a custom-built test chamber for evaluation and reliability testing of MEMS-based pressure transducers and other membrane-based devices, a probe station for electrical characterization of micro-devices, a fume hood configured for wet chemical etching of Si, polymers, and a wide variety of metals, tooling for electroplating, an optical reflectometer, and a supercritical point dryer for release of surface micromachined devices. The lab also has a PC with layout and finite element modeling software for device design, fabrication process design and analysis of testing data. Of particular interest are a Laser Micromachining System and an RIE Plasma System for patterning or etching materials, modifying surface properties, and cleaning substrates. These tools are critical for the fabrication of polymer-based implantable and non-implantable devices. The Parylene Deposition System in this laboratory has particular relevance to the development novel medical devices. Pacemaker leads, guide wires, catheters, and electrical surgical tools are coated with parylene for electrical insulation and lubricous coating.
